Vacuum Automation Technology

MVI_0763 MVI_0762 MVI_0761 MVI_0757

 

 

 

 

 

 

 

System ALD II

ALD System consisting of Vacuum Load Lock, Quad Vacuum Chamber w/Dual Arm Vacuum Robot and Hex Vacuum Chamber w/Dual Arm Vacuum Robot

 

 

DAVR

Dual Arm Vacuum Robot

Specifications:

  • Repeatability  10 micron

  • Reliability       MCBF > 18,000,000 Demonstrated Fleet

  •                             MTTR < 15 minutes

  • Wafer Size      Up too 450mm

  • Flat Panel        > 1 meter without reconfiguration

  • Throughput    Single Arm, Zero Process time, 200 wafers/hour

  • Payload            5 kg

  • Envelope         Reach (wrist) 500mm

  •                             Travel R 785mm, Theta Continuous

  • Contamination < 0.05 particles/pass 90 nanometer and above Demonstrated

  • Vacuum Compatibility  e-9 TORR

BST SAVR

 

JSAL EXT 300mm

 

 

200mm WCF Fl

 

TR7

 

TR10

TR8

200mm WCF Lid

Wafer Center Find Sensor Array 200mm, Dual Arm

BST 1HDLogo